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ASML
2026-03-01

Unveiling Chip Manufacturing: A Technical Breakdown from Wafer to Microchip

Summary

Brief: ASML released a technical article detailing the entire manufacturing process of microchips. The process begins with ultra-pure silicon wafers, where circuit patterns are transferred onto the wafer through lithography—the most critical step. The article emphasizes the role of lithography machines, which use Deep Ultraviolet (DUV) or Extreme Ultraviolet (EUV) light sources to precisely project design patterns from a mask onto a photoresist-coated wafer via complex optical systems. This is followed by hundreds of steps including etching, ion implantation, deposition, chemical mechanical planarization (CMP), and metal interconnection, ultimately forming hundreds of individual chips on a single wafer before final testing, dicing, and packaging.

The entire manufacturing process takes place in cleanrooms, demanding extreme precision and cleanliness, involving nanoscale dimension control. The article highlights EUV lithography as the key enabling technology for the most advanced nodes (e.g., 5nm and below), with its 13.5nm wavelength light source enabling finer circuit patterns.

**Comment**: This content is not a new product launch but a科普-style technical explanation of the core manufacturing process, particularly the "bottleneck" step of lithography. It is valuable for readers seeking to understand the foundational technologies of the semiconductor industry and ASML's core business value, underscoring the irreplaceable role of lithography, especially EUV technology, in advanced process nodes.
Source: ASML News
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